Molybenum shows good corrosion resistance against liquid metals like tin. This makes it an ideal material for EUV sources. However, a disadvantage of conventional processed Molybdenum is a rather low ductility at room temperature, depending on deformation and annealing conditions. Through extensive studies of grain boundaries and the segregation behavior of foreign elements in Molybdenum, combined with a special thermo-mechanical treatment, Plansee was able to engineer a ductile Molybdenum called DUMOMET®. Room temperature tensile tests reveal an increased elongation at room temperature for DUMOMET® of over 30%, an ultimate tensile strength of approx. 540MPa and a yield strength of approx. 370MPa. Due to special thermo-mechanical processing the material shows isotropic behavior in all three dimensions. Furthermore, the fracture toughness increases significantly from a low single digit number up to 23MPa√m which qualifies the material also for pressure vessel applications. Bending tests show that the fracture mechanism changes from inter-crystalline for conventional treated Molybdenum to trans-crystalline fracture mode for DUMOMET®.
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