Dr. Alexander Wiessner Profile

Dr. Alexander Wiessner

Principal Engineer at Lighthouse Photonics Inc

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 28 May 2004 Paper

Sub-0.25-pm 50-W amplified excimer laser system for 193-nm lithography

Sergei Govorkov, Alexander Wiessner, Gongxue Hua, Timur Misuryaev, Andrey Knysh, Stefan Spratte, Peter Lokai, Tamas Nagy, Igor Bragin, Andreas Targsdorf, Thomas Schroeder, Hans-Stephan Albrecht, Rainer Desor, Thomas Schmidt, Rainer Paetzel

Proc. SPIE. 5377, Optical Microlithography XVII

KEYWORDS: Lithography, Optical amplifiers, Optical lithography, Oscillators, Amplifiers, Excimer lasers, Molybdenum, Pulsed laser operation, Optics manufacturing, Laser systems engineering

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Proceedings Article | 17 June 2003 Paper

High-peak power solid state laser for micromachining of hard materials

Ludolf Herbst, John Quitter, Gregory Ray, Thomas Kuntze, Alexander Wiessner, Sergei Govorkov, Mike Heglin

Proc. SPIE. 4968, Solid State Lasers XII

KEYWORDS: Diamond, Silicon, Manufacturing, Nd:YAG lasers, Laser drilling, Solid state lasers, Head, Micromachining, Pulsed laser operation, Diode pumped solid state lasers

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Proceedings Article | 6 November 2000 Paper

Novel results of laser precision microfabrication with excimer lasers and solid state lasers

Uwe Stamm, Michael Fiebig, Sergei Govorkov, Eric Mayer, Rustem Osmanov, Michael Scaggs, Evgueni Slobodtchikov, Alexander Wiessner, Dirk Basting

Proc. SPIE. 4088, First International Symposium on Laser Precision Microfabrication

KEYWORDS: Annealing, Laser applications, Laser development, Nd:YAG lasers, Laser ablation, Excimer lasers, Microfabrication, Fluorine, Pulsed laser operation, Diode pumped solid state lasers

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Proceedings Article | 16 August 2000 Paper

High-throughput micromachining of steel and ceramics with solid state UV laser

Sergei Govorkov, Evgueni Slobodtchikov, Alexander Wiessner, Dirk Basting

Proc. SPIE. 4065, High-Power Laser Ablation III

KEYWORDS: Titanium, Metals, Ultraviolet radiation, Ceramics, Laser drilling, Laser ablation, Aluminum, Pulsed laser operation, Plasma, Absorption

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Proceedings Article | 7 June 2000 Paper

High-accuracy microdrilling of steel with solid state UV laser at a rate of 10 mm/sec

Sergei Govorkov, Evgueni Slobodtchikov, Alexander Wiessner, Dirk Basting

Proc. SPIE. 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V

KEYWORDS: Signal attenuation, Metals, Ultraviolet radiation, Nd:YAG lasers, Laser drilling, Solid state lasers, Laser ablation, Laser damage threshold, Solid state physics, Plasma

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