Prof. Alexandre V. Tishchenko
at Univ Lyon
SPIE Involvement:
Publications (28)

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Reticles, Optical lithography, Data modeling, Visualization, Sensors, Scanners, Manufacturing, Image resolution, Time metrology, Photomasks, Semiconducting wafers, Product engineering, Performance modeling, Chemical mechanical planarization, Design for manufacturability

Proceedings Article | 4 September 2015 Paper
Proc. SPIE. 9661, 31st European Mask and Lithography Conference
KEYWORDS: Logic, Optical lithography, Sensors, Scanners, Printing, Photomasks, Semiconducting wafers, Product engineering, Electroluminescent displays, Polonium

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Wafer-level optics, Data modeling, Sensors, Scanners, Silicon, Finite element methods, Photomasks, Convolution, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Wafer-level optics, Lithography, Finite-difference time-domain method, Optical lithography, Silicon, Computer simulations, Photomasks, Optical proximity correction, Semiconducting wafers, Global system for mobile communications

Proceedings Article | 6 February 2008 Paper
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Diffraction, Optical design, Antireflective coatings, Silica, Reflection, Dielectrics, Interfaces, Coating, Reflectivity, Diffraction gratings

Showing 5 of 28 publications
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