Dr. Alexandru Andrei
at Univ de Franche-Comté
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 11 August 2008 Paper
Proc. SPIE. 7064, Interferometry XIV: Applications
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Multilayers, Electrodes, Silicon, Interferometry, Scanning electron microscopy, Finite element methods, Aluminum nitride

Proceedings Article | 25 April 2008 Paper
Proc. SPIE. 6995, Optical Micro- and Nanometrology in Microsystems Technology II
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Multilayers, Electrodes, Silicon, Interferometry, Silicon films, Finite element methods, Aluminum nitride

Proceedings Article | 25 April 2008 Paper
Proc. SPIE. 6995, Optical Micro- and Nanometrology in Microsystems Technology II
KEYWORDS: Microelectromechanical systems, Microscopes, Beam splitters, Holograms, Holography, 3D image reconstruction, Digital holography, Vibrometry, Aluminum nitride, Charge-coupled devices

Proceedings Article | 14 August 2006 Paper
Proc. SPIE. 6293, Interferometry XIII: Applications
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Silicon, Interferometry, Ultrasonics, Microactuators, Transducers, Aluminum nitride, Acoustics

Proceedings Article | 9 May 2006 Paper
Proc. SPIE. 6193, Reliability of Optical Fiber Components, Devices, Systems, and Networks III
KEYWORDS: Microelectromechanical systems, Gold, Optical fibers, Refractive index, Metals, Glasses, Reliability, Tomography, Micro optics, Aluminum nitride

Showing 5 of 6 publications
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