Dr. Ali Najafi Sohi Profile

Dr. Ali Najafi Sohi

at Univ of Waterloo

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Author

Publications (3)

Proceedings Article | 7 March 2014 Paper

A bi-material microbeam based thermal actuator for out-of-plane rotation

Ali Najafi Sohi, Patricia Nieva

Proceedings Volume 8977, 89770M (2014) https://doi.org/10.1117/12.2040728

KEYWORDS: Gold, Actuators, Silicon, Computer aided design, Temperature metrology, Metals, Micromirrors, Computer simulations, Mirrors, Optical lithography

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Proceedings Article | 9 March 2013 Paper

A smaller footprint MEMS sensor for on-chip temperature measurement

A. Najafi Sohi, P. Nieva, A. Khajepour

Proceedings Volume 8614, 86140B (2013) https://doi.org/10.1117/12.2005460

KEYWORDS: Sensors, Electrodes, Microelectromechanical systems, Temperature metrology, Temperature sensors, Gold, Finite element methods, Capacitance, Silicon, Dielectrics

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Proceedings Article | 15 February 2012 Paper

Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield

Patricia Nieva, Jeremy Godin, Ryan Norris, Ali Najafi Sohi, Timothy Leung

Proceedings Volume 8250, 825003 (2012) https://doi.org/10.1117/12.910854

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Etching, Plasma etching, Silicon, Plasma, Plasma enhanced chemical vapor deposition, Silicon films, Nanolithography, Sensors

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