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Allan H. Tram
Product Manager at Entegris Inc
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Publications (4)
Proceedings Article | 10 May 2005 Paper
Effects of high moisture on the purification of clean compressed air
Allan Tram, Daniel Alvarez, Joe Rotter
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.601035
KEYWORDS: Carbon, Adsorption, Zeolites, Optical lithography, Gases, Contamination, Humidity, Ionization, Sensors, Nitrogen
Proceedings Article | 27 January 2005 Paper
Effects of high moisture on the purification of clean compressed air
Allan Tram, Min Guo, Joseph Rotter, Russell Holmes, Daniel Alvarez
Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.580509
KEYWORDS: Carbon, Picture Archiving and Communication System, Optical lithography, Semiconductors, Gases, Nitrogen, Adsorption, Ionization, Sensors, Optics manufacturing
Proceedings Article | 24 May 2004 Paper
Contaminant dry-down rates in photolithography purge gases
Jeffrey Spiegelman, Daniel Alvarez, Allan Tram, Russell Holmes
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534296
KEYWORDS: Nitrogen, Adsorption, Microsoft Foundation Class Library, Optical lithography, Gases, Oxygen, Sulfur, Contamination, Deep ultraviolet, Natural surfaces
Proceedings Article | 2 June 2003 Paper
Identification and quantitative analysis of contaminants found in photolithography purge gases
Allan Tram, Russell Holmes, Dan Lev, Jeff Spiegelman, Daniel Alvarez
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.488483
KEYWORDS: Calibration, Optical lithography, Gases, Statistical analysis, Quantitative analysis, Spatial light modulators, Contamination, Adsorption, Nitrogen, Process control
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