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Allyn Jackson
Technical Support and FAE Manager at CyberOptics Corp
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Author
Publications (4)
Proceedings Article | 22 February 2021 Open Access Presentation
CyberOptics Corp.: Importance of identifying airborne particles in process environments
Proceedings Volume 11669, 1166901 (2021) https://doi.org/10.1117/12.2595432
Proceedings Article | 18 September 2020 Presentation
CyberOptics Corporation: Introduction to Wireless Reticle Devices and the New Inline Particle Sensor
Proceedings Volume PV20EX, PV20EX06 (2020) https://doi.org/10.1117/12.2583893
Proceedings Article | 4 September 2015 Paper
Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments
Proceedings Volume 9661, 96610Y (2015) https://doi.org/10.1117/12.2209736
KEYWORDS: Reticles, Particles, Sensors, Scanners, Environmental sensing, Photomasks, Atmospheric particles, Semiconducting wafers, Inspection, Contamination control
Proceedings Article | 16 September 2014 Paper
Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments
Proceedings Volume 9235, 92350E (2014) https://doi.org/10.1117/12.2066378
KEYWORDS: Reticles, Particles, Sensors, Scanners, Environmental sensing, Atmospheric particles, Semiconducting wafers, Inspection, Photomasks, Contamination control
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