Alok Vaid
Sr. Manager Process Engineering at GLOBALFOUNDRIES Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (51)

SPIE Journal Paper | 14 August 2018
JM3 Vol. 17 Issue 03
KEYWORDS: Semiconducting wafers, Data modeling, Metrology, Reactive ion etching, Diffractive optical elements, Optics manufacturing, Optical lithography, Scatterometry, Overlay metrology, Transmission electron microscopy

Proceedings Article | 22 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Fin field effect transistors, X-rays, Silicon, Image resolution, Scanning electron microscopy, 3D metrology, Process control, Critical dimension metrology, Overlay metrology

Proceedings Article | 21 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Modulation, Sensors, Etching, Silicon, Signal processing, Semiconducting wafers, Yield improvement, Temperature metrology, Plasma

Proceedings Article | 13 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Optical lithography, Data modeling, Scanners, 3D modeling, Scanning electron microscopy, Photoresist materials, Optical proximity correction, Critical dimension metrology, Process modeling

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Diffractive optical elements, Fiber optic gyroscopes, Metals, Dielectrics, Electrons, Dielectrophoresis, Personal digital assistants, Process control, Semiconducting wafers

Showing 5 of 51 publications
Conference Committee Involvement (9)
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
22 February 2021 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXIV
24 February 2020 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXIII
25 February 2019 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXII
26 February 2018 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXI
27 February 2017 | San Jose, California, United States
Showing 5 of 9 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top