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Alon Nobuteru Takashima
Director at Seiwa Optical America Inc
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Publications (1)
Proceedings Article | 26 September 2019 Paper
High throughput AFM inspection system with parallel active cantilevers
M. Holz, C. Reuter, A. Reum, A. Ahmad, M. Hofmann, T. Ivanov, I. Rangelow, J. Stauffenberg, E. Manske, C. Du, X. Q. Zhou, N. Okamoto, A. N. Takashima, H. S. Lee
Proceedings Volume 11148, 111481E (2019) https://doi.org/10.1117/12.2537009
KEYWORDS: Inspection, Atomic force microscopy, Chemical mechanical planarization, Actuators, Metrology, Semiconductors, Optical inspection, Charged particle optics, Electron beams, Photomasks
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