Dr. Alon Yagil Profile

Dr. Alon Yagil

at KLA

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Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

Parallax method for diffraction-based single-cell overlay and film thickness measurement

Mordecai Kot, Yuval Lamhot, Alon Yagil, Tal Yaziv, Nadav Gutman, Renan Milo

Proceedings Volume 12496, 124963A (2023) https://doi.org/10.1117/12.2659163

KEYWORDS: Overlay metrology, Diffraction, Semiconducting wafers, Calibration, Diffraction gratings, Optical alignment, Film thickness

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Proceedings Article | 22 February 2021 Presentation + Paper

Signal weighted overlay optimizer for scatterometry metrology

A. Yagil, R. Dirawi, W. L. Lin, A. Volfman, Y. Men, R. Milo, T. Yaziv, Y. Lamhot

Proceedings Volume 11611, 1161124 (2021) https://doi.org/10.1117/12.2583866

KEYWORDS: Overlay metrology, Metrology, Scatterometry, Principal component analysis, Optical parametric oscillators, Mathematical modeling, Detection and tracking algorithms, Algorithm development

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