Dr. Alvaro Gil González Profile

Dr. Alvaro Gil González

at Univ de Santiago de Compostela

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Publications (1)

Proceedings Article | 26 July 2011 Paper

Diffractive masks by confocal microscopy

P. Maceira, V. Moreno, J. R. Salgueiro, F. Guitian, A. Gil

Proceedings Volume 8001, 80013L (2011) https://doi.org/10.1117/12.892177

KEYWORDS: Photomasks, Confocal microscopy, Diffraction gratings, Microscopes, Photoresist materials, Fabrication, Lithography, Photonic crystals, Control systems, Aluminum

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