Dr. Amit Suratkar Profile

Dr. Amit Suratkar

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Publications (3)

Proceedings Article | 14 September 2011 Paper

Absolute thickness measurement of silicon wafer using wavelength scanning interferometer

Young-Sik Ghim, Amit Suratkar, Angela Davies, Yun-Woo Lee

Proceedings Volume 8133, 813312 (2011) https://doi.org/10.1117/12.898354

KEYWORDS: Semiconducting wafers, Interferometry, Silicon, Wafer-level optics, Charge-coupled devices, Reflectivity, Interferometers, Reflectometry, Refractive index, Error analysis

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Proceedings Article | 11 August 2008 Paper

Uncertainty analysis on the absolute thickness of a cavity using a commercial wavelength scanning interferometer

Amit Suratkar, Young-Sik Ghim, Angela Davies

Proceedings Volume 7063, 70630R (2008) https://doi.org/10.1117/12.793772

KEYWORDS: Fourier transforms, Calibration, Interferometers, Silica, Interferometry, Error analysis, Temperature metrology, Uncertainty analysis, Distance measurement, Refractive index

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Proceedings Article | 14 September 2007 Paper

New interferometric technique to measure the length (thickness) of opaque objects using a commercial interferometer

Amit Suratkar, Angela Davies, Faramarz Farahi

Proceedings Volume 6671, 66710N (2007) https://doi.org/10.1117/12.733934

KEYWORDS: Interferometry, Opacity, Mirrors, Refractive index, Interferometers, Phase interferometry, Fringe analysis, Neodymium, Light sources, Distance measurement

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