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Anas Fauzi
at Chungbuk National Univ
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Publications (1)
Proceedings Article | 1 March 2013 Paper
Three dimensional (3D) parallel processing holographic lithography using femtosecond laser pulse
Anas Fauzi, Sung-Jin Kim, Jong-Rae Jung, Seok-Hee Jeon, Nam Kim
Proceedings Volume 8644, 864404 (2013) https://doi.org/10.1117/12.2003503
KEYWORDS: Computer generated holography, Silica, Holograms, Holography, Lithography, Femtosecond phenomena, 3D image processing, Diffraction, Spatial light modulators, Silicon
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