Necessity of miniaturize and to create reliable components for wavefront correctors leads to reduction of the cross-section of the control elements in deformable mirrors. Moreover, such elements should provide reasonable stroke to compensate for wavefront aberrations of the laser radiation propagated through turbulent atmosphere. In this work we simulated the possibility of reducing the cross-sectional area of piezoactuators from 16 mm2 to 5 mm2 in order to hold up the local stroke as 5 microns in the cartridge-type deformable mirror for correction of large- and small-scale phase fluctuations of laser radiation. To increase the reliability of deformable mirror design, the gap structure was used for wiring of electrodes instead of interdigitated commutation.
The stacked-actuator deformable mirror with a high spatial resolution of the control elements was developed. The key advantage of such a mirror is its simplicity of design, thanks to the use of piezoceramic combs. Each comb consists of 5 piezo actuators arranged in a row. By assembling such combs on a piezoceramic base, it is possible to obtain the desired geometry of the control elements of the piezoactuator mirror. On an aperture of 50 * 50 mm, 100 actuators were placed in a rectangular configuration, on which a reflective substrate with a thickness of 1 mm was glued. A deformation of the mirror of 4.5 μm was obtained under the action of a control voltage of +300 V.
Stacked-array deformable mirror is one of the most popular tools for correction of wavefront aberrations. We manufactured the stacked-array deformable mirror with small diameter by using piezoceramic combs with few actuators on them. In this case the aperture of mirror will be equal to 30 mm. The stroke of such mirror would be about 5 microns. The thickness of the mirror substrate is 1 mm. Developed deformable mirrors will be suitable for fast adaptive optical systems for optical radiation transferring through turbulent atmosphere tasks.
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