Dr. Anatoly Y. Bourov
Publications (46)

Proceedings Article | 16 October 2020 Presentation + Paper
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Optical lithography, Printing, Image quality, Photomasks, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Stochastic processes, Binary data, Phase shifts

SPIE Journal Paper | 11 June 2013
OE Vol. 52 Issue 06
KEYWORDS: In situ metrology, Image processing, Principal component analysis, Process modeling, Lithography, Matrices, Optical engineering, Image retrieval, Lithographic illumination, Zernike polynomials

SPIE Journal Paper | 7 May 2013
OE Vol. 52 Issue 05
KEYWORDS: Photomasks, Lithography, Artificial intelligence, Principal component analysis, Optical engineering, Process modeling, Wavefront aberrations, Monochromatic aberrations, Instrument modeling, Mechanics

Proceedings Article | 18 April 2013 Paper
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Reticles, Scanners, Process control, Photomasks, Critical dimension metrology, Semiconducting wafers, Binary data, Overlay metrology, Phase shifts

Proceedings Article | 18 December 2012 Paper
Proc. SPIE. 8550, Optical Systems Design 2012
KEYWORDS: Lithography, Principal component analysis, Statistical analysis, Lithographic illumination, Imaging systems, Matrices, Image processing, Error analysis, Artificial intelligence, Process modeling

Showing 5 of 46 publications
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