CONFERENCE PROCEEDINGS
Advanced Search
Dr. Andi Putra
at National Univ of Singapore
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 2 April 2010 Paper
Monitoring and control of photoresist properties and CD during photoresist processing
Proceedings Volume 7638, 763828 (2010) https://doi.org/10.1117/12.846560
KEYWORDS: Semiconducting wafers, Photoresist materials, Lithography, Critical dimension metrology, Spectroscopy, Photoresist processing, Manufacturing, Process control, Sensors, Resistance
Proceedings Article | 14 December 2006 Paper
Compensation of nonlinearities in a piezoelectric stack actuator with application in intra-cytoplasmic sperm injection
A.. Putra, K. Tan, T. Lee, S. Panda, S. Huang, S. Zhao
Proceedings Volume 6416, 64160B (2006) https://doi.org/10.1117/12.693265
KEYWORDS: Actuators, Control systems, Feedback control, Motion models, Biomedical optics, Systems modeling, Modulation, Error analysis, Nanoengineering, Neural networks
Proceedings Article | 5 December 2005 Paper
Partial-rotating piezoelectric actuators for intracytoplasmic sperm injection
Proceedings Volume 6048, 60480N (2005) https://doi.org/10.1117/12.667063
KEYWORDS: Prototyping, Actuators, Control systems, Ceramics, Computer engineering, Microelectromechanical systems, Surgery, Sensors, Motion controllers, Wave propagation
Proceedings Article | 5 December 2005 Paper
Piezo stack actuation control system for sperm injection
Proceedings Volume 6048, 60480O (2005) https://doi.org/10.1117/12.667072
KEYWORDS: Control systems, Actuators, Adaptive control, Algorithm development, Motion models, Protactinium, Model-based design, Systems modeling, Biomedical optics, Tolerancing
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top