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André Perret
Retired at Ctr Suisse d'Electronique et de Microtechnique SA
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 19 April 2002 Paper
Silicon as material for mechanical wristwatches
Andre Perret, Arno Hoogerwerf, Philippe Niedermann, Xiao-Ming Tang, Sylvain Jeanneret, Pierre-Andre Clerc, Nico de Rooij, Pierre Gygax
Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462866
KEYWORDS: Silicon, Microelectromechanical systems, Etching, Semiconducting wafers, Oxides, Deep reactive ion etching, Nickel, Magnetism, Manufacturing equipment, Ions
Conference Committee Involvement (1)
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
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