Dr. Andreas Bich
at SUSS MicroOptics SA
SPIE Involvement:
Publications (11)

Proceedings Article | 16 February 2012 Paper
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Micromirrors, Semiconducting wafers, Beam shaping, Optical simulations, Reflectivity, Diffusers, Diffraction, Silicon, Actuators, Wafer-level optics

Proceedings Article | 21 September 2011 Paper
Proc. SPIE. 8170, Illumination Optics II
KEYWORDS: Photomasks, Lithographic illumination, Lithography, Molybdenum, Semiconducting wafers, Spatial filters, Light sources, Integrated optics, Diffraction, Optical filters

Proceedings Article | 14 February 2011 Paper
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Mirrors, Diffusers, Microopto electromechanical systems, Actuators, Micromirrors, Silicon, Ultraviolet radiation, Beam shaping, Pulse shaping, Magnetism

Proceedings Article | 17 February 2010 Paper
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Diffusers, Mirrors, Silicon, Aluminum, Semiconductor lasers, Magnetism, Actuators, Coating, Deep reactive ion etching, Crystals

Proceedings Article | 24 August 2009 Paper
Proc. SPIE. 7430, Laser Beam Shaping X
KEYWORDS: Microlens array, Beam homogenizers, Optical components, Telescopes, Homogenization, Beam shaping, Diffractive optical elements, Excimer lasers, Diffusers, Microlens

Showing 5 of 11 publications
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