Andreas Heberer
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 1 April 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Spectroscopy, Silicon, Etching, Near infrared, Diffraction gratings, Diodes, Semiconducting wafers, Signal processing, Mirrors, Monochromators

Proceedings Article | 7 February 2007 Paper
Proc. SPIE. 6489, Projection Displays XII
KEYWORDS: Projection systems, Mirrors, Sensors, Microopto electromechanical systems, Gyroscopes, Projection devices, Silicon, Scanners, Semiconductor lasers, Laser sources

Proceedings Article | 22 January 2007 Paper
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Mirrors, Spectroscopy, Etching, Diffraction gratings, Diodes, Silicon, Control systems, Oxides, Scanning electron microscopy, Signal processing

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Mirrors, Etching, Silicon, Diffraction gratings, Spectroscopy, Micromirrors, Anisotropic etching, Wet etching, Aluminum, Diffraction

Proceedings Article | 8 November 2005 Paper
Proc. SPIE. 5996, Optical Sensors and Sensing Systems for Natural Resources and Food Safety and Quality
KEYWORDS: Spectrometers, Microopto electromechanical systems, Mirrors, Signal processing, Digital signal processing, Agriculture, Sensors, Silicon, Spectroscopy, Optical components

Showing 5 of 9 publications
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