Dr. Andreas Schneider
Microsystems Scientist at Rutherford Appleton Lab
SPIE Involvement:
Publications (6)

Proceedings Article | 24 August 2015 Paper
Proc. SPIE. 9601, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XIX
KEYWORDS: Telescopes, X-ray optics, Sensors, Spectroscopy, X-rays, Electrons, Field programmable gate arrays, Space telescopes, Spatial resolution, Astrophysics

Proceedings Article | 24 April 2003 Paper
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Lithography, Ultraviolet radiation, Composites, Nickel, Silicon, Bone, Photomasks, Electroplating, Temperature metrology, Protactinium

Proceedings Article | 10 September 2002 Paper
Proc. SPIE. 4928, MEMS/MOEMS Technologies and Applications
KEYWORDS: Microelectromechanical systems, Gold, Polishing, Calibration, Ultraviolet radiation, Nickel, Scanning electron microscopy, Photoresist materials, Semiconducting wafers, Prototyping

Proceedings Article | 19 November 2001 Paper
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Gold, Polymethylmethacrylate, X-rays, Nickel, Manufacturing, Photomasks, Synchrotrons, Beryllium, Photoresist processing, Semiconducting wafers

Proceedings Article | 20 August 2001 Paper
Proc. SPIE. 4343, Emerging Lithographic Technologies V
KEYWORDS: Polymethylmethacrylate, Calibration, Photons, X-rays, Scanning electron microscopy, Photomasks, Aluminum, Synchrotrons, Critical dimension metrology, X-ray lithography

Showing 5 of 6 publications
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