Dr. Andreas Wagener
at Univ Siegen
SPIE Involvement:
Publications (9)

Proceedings Article | 20 December 2006 Paper
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Microelectromechanical systems, Materials processing, Manufacturing, 3D modeling, Microelectronics, Photomasks, TCAD, Prototyping, Process modeling, Device simulation

Proceedings Article | 21 April 2006 Paper
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Fabrication, Microelectromechanical systems, Silicon, Materials processing, Manufacturing, Photomasks, Process modeling, Device simulation, Process engineering, Environmental management

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Microelectromechanical systems, Data storage, Databases, Interfaces, Data processing, Structural design, Semiconducting wafers, Prototyping, Process modeling, Environmental management

Proceedings Article | 5 January 2006 Paper
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Microelectromechanical systems, Computer simulations, 3D modeling, Data processing, Photomasks, Structural design, TCAD, Process modeling, Device simulation, Environmental management

Proceedings Article | 1 July 2005 Paper
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Data modeling, Databases, Etching, Polymers, Interfaces, Materials processing, Data processing, Computer aided design, Process engineering

Showing 5 of 9 publications
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