Dr. Andreas Wagener Profile

Dr. Andreas Wagener

at Univ Siegen

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 20 December 2006 Paper

Optimization of MEMS fabrication process design by virtual experiments

T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, R. Brück

Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III

KEYWORDS: Microelectromechanical systems, Materials processing, Manufacturing, 3D modeling, Microelectronics, Photomasks, TCAD, Prototyping, Process modeling, Device simulation

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Proceedings Article | 21 April 2006 Paper

Management and verification for MEMS fabrication processes

T. Schmidt, D. Ortloff, K. Hahn, A. Wagener, J. Popp, R. Brück

Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II

KEYWORDS: Fabrication, Microelectromechanical systems, Silicon, Materials processing, Manufacturing, Photomasks, Process modeling, Device simulation, Process engineering, Environmental management

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Proceedings Article | 23 January 2006 Paper

Process design and tracking support for MEMS

A. Wagener, T. Schmidt, J. Popp, K. Hahn, R. Brück, D. Ortloff

Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI

KEYWORDS: Microelectromechanical systems, Data storage, Databases, Interfaces, Data processing, Structural design, Semiconducting wafers, Prototyping, Process modeling, Environmental management

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Proceedings Article | 5 January 2006 Paper

Knowledge-based process simulation and design system for MEMS

J. Popp, T. Schmidt, A. Wagener, K. Hahn, R. Brück, A. Hössinger

Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II

KEYWORDS: Microelectromechanical systems, Computer simulations, 3D modeling, Data processing, Photomasks, Structural design, TCAD, Process modeling, Device simulation, Environmental management

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Proceedings Article | 1 July 2005 Paper

CAD tool environment for MEMS process design support

T. Schmidt, A. Wagener, J. Popp, K. Hahn, R. Bruck

Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II

KEYWORDS: Microelectromechanical systems, Data modeling, Databases, Etching, Polymers, Interfaces, Materials processing, Data processing, Computer aided design, Process engineering

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Proceedings Article | 28 February 2005 Paper

Technology interfaces to microsystem and nanoelectronic processes

Thilo Schmidt, Andreas Wagener, Jens Popp, Kai Hahn

Proc. SPIE. 5649, Smart Structures, Devices, and Systems II

KEYWORDS: Microelectromechanical systems, Microsystems, Databases, Etching, Interfaces, Data processing, Java, Computer aided design, Computer architecture, Nanoelectronics

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Proceedings Article | 22 January 2005 Paper

MEMS fabrication process management environment

Jens Popp, Thilo Schmidt, Andreas Wagener, Kai Hahn

Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X

KEYWORDS: Microelectromechanical systems, Data modeling, Databases, Etching, Interfaces, Data processing, Java, Computer aided design, Device simulation, Environmental management

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Proceedings Article | 30 March 2004 Paper

Process management and design for MEMS and microelectronics technologies

Kai Hahn, Jens Popp, Andreas Wagener

Proc. SPIE. 5274, Microelectronics: Design, Technology, and Packaging

KEYWORDS: Microelectromechanical systems, Databases, Etching, Interfaces, 3D modeling, Data processing, Microelectronics, Photomasks, Computer aided design, Process modeling

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Proceedings Article | 30 December 2003 Paper

Process design environment for microfabrication technologies

Andreas Wagener, Jens Popp, Kai Hahn

Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX

KEYWORDS: Microelectromechanical systems, Data modeling, Data storage, Databases, Interfaces, Data processing, Finite element methods, Java, Photomasks, Analog electronics

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Showing 5 of 9 publications

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