Andreia Figueiredo dos Santos
R&D Manager at SCREEN SPE Germany GmbH
SPIE Involvement:
Author
Area of Expertise:
Process optimization , Lithography , Track process
Profile Summary

Andreia Santos received 2008 her Master's Degree in Chemical Engineering from Aveiro University in Portugal, where she specialized in polymer chemistry and characterization of materials. Her first experience in the semiconductors’ world was in 2011 when she joined Nanium - a wafer-level packaging company - as a photolithography process engineer. Two years later, she moved to Belgium and started to work at JSR Micro – a leading materials supplier - where she had the opportunity to get a deeper understanding of photoresist chemistry. After working for a chip maker and a resist supplier, in 2020 Andreia decided to join Screen’s team at Imec, where she currently works as R&D Manager.
Publications (21)

Proceedings Article | 13 November 2024 Presentation
Proceedings Volume PC13215, PC1321507 (2024) https://doi.org/10.1117/12.3036987
KEYWORDS: Lithography, Sustainability, Semiconductor manufacturing, Optics manufacturing, Spin on carbon materials, Semiconductors, Power consumption, Industry, Carbon, System integration

SPIE Journal Paper | 18 October 2024
Julie Van Bel, Lander Verstraete, Hyo Seon Suh, Philippe Bezard, Alain Moussa, Andreia Santos, YoungJun Her, Stefan De Gendt
JM3, Vol. 23, Issue 04, 043001, (October 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.043001
KEYWORDS: Block copolymers, Extreme ultraviolet, Directed self assembly, Annealing, Extreme ultraviolet lithography, Film thickness, Bridges, Picosecond phenomena, Etching, Semiconducting wafers

SPIE Journal Paper | 4 September 2024
Seungjoo Baek, Jelle Vandereyken, Hyo Seon Suh, Elke Caron, Andreia Santos, Masahiko Harumoto, Douglas Guerrero, Seonggil Heo
JM3, Vol. 23, Issue 03, 034602, (September 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.3.034602
KEYWORDS: Power consumption, Sustainability, Spin on carbon materials, Semiconductors, Etching, Optical lithography, Thermography, Industry, Semiconductor manufacturing, Optics manufacturing

Proceedings Article | 10 April 2024 Presentation + Paper
Andreia Santos, Wesley Zanders, Elke Caron, Seungjoo Baek, Seonggil Heo, Jelle Vandereyken, Hyo Seon Suh, Douglas Guerrero, Masahiko Harumoto, Tsuyoshi Mitsuashi
Proceedings Volume 12957, 1295717 (2024) https://doi.org/10.1117/12.3010506
KEYWORDS: Spin on carbon materials, Sustainability, Thermography, Power consumption, Lithography, Displays, Semiconductors, Optical lithography, Materials processing, Extreme ultraviolet

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12957, 129570Z (2024) https://doi.org/10.1117/12.3010976
KEYWORDS: Semiconducting wafers, Particles, Scanning electron microscopy, Extreme ultraviolet lithography, Scanners, Photoresist materials, Displays, Deformation

Showing 5 of 21 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top