Dr. Andrew E. Carlson Profile

Dr. Andrew E. Carlson

Sr. Design Engineer at Advanced Micro Devices Inc

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Author

Publications (7)

SPIE Journal Paper | 1 January 2009

Low-variability negative and iterative spacer processes for sub-30-nm lines and holes

Andrew Carlson, Tsu-Jae King Liu

JM3, Vol. 8, Issue 01, 011009, (January 2009) https://doi.org/10.1117/12.10.1117/1.3059550

KEYWORDS: Lithography, Photomasks, Etching, Optical lithography, Critical dimension metrology, Anisotropic etching, Silicon, Amorphous silicon, Chemical vapor deposition, Transistors

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Proceedings Article | 12 August 2008 Paper

Optimization of antireflection coating design for multijunction solar cells and concentrator systems

Christopher Valdivia, Eric Desfonds, Denis Masson, Simon Fafard, Andrew Carlson, John Cook, Trevor Hall, Karin Hinzer

Proceedings Volume 7099, 709915 (2008) https://doi.org/10.1117/12.807675

KEYWORDS: Solar cells, Antireflective coatings, Coating, Refractive index, Silicon, Solar concentrators, Absorption, Photovoltaics, Multijunction solar cells, Ultraviolet radiation

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Proceedings Article | 11 April 2008 Paper

Negative and iterated spacer lithography processes for low variability and ultra-dense integration

Andrew Carlson, Tsu-Jae King Liu

Proceedings Volume 6924, 69240B (2008) https://doi.org/10.1117/12.772049

KEYWORDS: Lithography, Photomasks, Etching, Critical dimension metrology, Optical lithography, Chemical vapor deposition, Silicon, Amorphous silicon, Transistors, Anisotropic etching

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Proceedings Article | 5 July 2000 Paper

First tests of the interferometer in the micro-arcsecond metrology testbed (MAM)

Andreas Kuhnert, Stuart Shaklan, TsePyng Shen, Andrew Carlson, Steven Azevedo

Proceedings Volume 4006, (2000) https://doi.org/10.1117/12.390283

KEYWORDS: Interferometers, Ferroelectric materials, CCD cameras, Sensors, Charge-coupled devices, Metrology, Fringe analysis, Beam splitters, Cameras, Visibility

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Proceedings Article | 24 July 1998 Paper

Micro-Arcsecond Metrology testbed (MAM)

Stuart Shaklan, Steven Azevedo, Randall Bartos, Andrew Carlson, Yekta Gursel, Peter Halverson, Andreas Kuhnert, Yao Lin, R. Savedra, Edouard Schmidtlin

Proceedings Volume 3350, (1998) https://doi.org/10.1117/12.317192

KEYWORDS: Metrology, Stars, Interferometers, Laser metrology, Mirrors, Beam splitters, Control systems, Ferroelectric materials, Distance measurement, Sensors

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Proceedings Article | 24 July 1998 Paper

Optomechanical design of the Micro-Arcsecond Metrology testbed interferometer

Andrew Carlson, Stuart Shaklan, Randall Bartos, Steven Azevedo

Proceedings Volume 3350, (1998) https://doi.org/10.1117/12.317183

KEYWORDS: Mirrors, Metrology, Interferometers, Waveguides, Retroreflectors, Stars, Prisms, Beam splitters, Charge-coupled devices, Coating

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Proceedings Article | 24 July 1998 Paper

Novel wide-field-of-view laser retroreflector for the Space Interferometry Mission

Edouard Schmidtlin, Stuart Shaklan, Andrew Carlson

Proceedings Volume 3350, (1998) https://doi.org/10.1117/12.317182

KEYWORDS: Prisms, Retroreflectors, Prototyping, Interferometry, Metrology, Optics manufacturing, Reflectivity, Laser interferometry, Spherical lenses, Glasses

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Showing 5 of 7 publications

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