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Andrew John Dowling
at Swinburne Univ of Technology
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Publications (4)
Proceedings Article | 2 April 2004 Paper
Selective wet-etching of filtered arc deposited TiN films on Cr sacrificial layers
Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.524048
KEYWORDS: Chromium, Tin, Etching, Silicon, Scanning electron microscopy, Optical lithography, Microelectromechanical systems, Photomasks, Bridges, Sensors
Proceedings Article | 13 November 2002 Paper
Single-shot selective laser micromachining of filtered-arc-deposited TiN films from chromium underlayer
Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469051
KEYWORDS: Tin, Chromium, Optical filters, Optical lithography, Micromachining, Silicon, Scanning electron microscopy, Confocal microscopy, Excimer lasers, Laser ablation
Proceedings Article | 21 November 2001 Paper
Laser-LIGA for Serpentine Ni Microstructure
Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448962
KEYWORDS: Nickel, Excimer lasers, Copper, Laser ablation, Polymers, Photoresist materials, Optical lithography, Confocal microscopy, Silicon, Etching
Proceedings Article | 21 November 2001 Paper
Excimer laser patterning of TiN film from metal sacrificial layers
Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.449005
KEYWORDS: Tin, Chromium, Silicon, Copper, Optical lithography, Excimer lasers, Laser ablation, Metals, Confocal microscopy, Photomicroscopy
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