Andrew C. Rudack
Sr Metrology Specialist at SUNY Poly SEMATECH
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 8 October 2014 Paper
Proc. SPIE. 9179, Reliability of Photovoltaic Cells, Modules, Components, and Systems VII
KEYWORDS: Manufacturing, Reliability, Metrology, Silicon, Semiconducting wafers, Photovoltaics, Crystals, Solar cells, Diodes, Silicon solar cells

SPIE Journal Paper | 5 June 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Annealing, X-rays, Finite element methods, Semiconducting wafers, Tomography, Copper, Inspection, X-ray imaging, X-ray microscopy, Silicon

Proceedings Article | 5 April 2012 Paper
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Plating, Ions, Metrology, Copper, Semiconducting wafers, Plasma, Inspection, Xenon, Scanning electron microscopy, Ion beams

Proceedings Article | 4 April 2012 Paper
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Semiconducting wafers, 3D metrology, Metrology, Inspection, Wafer bonding, Copper, Overlay metrology, Microscopes, Etching, Infrared microscopy

Proceedings Article | 3 April 2012 Paper
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: X-rays, Annealing, Tomography, Inspection, Semiconducting wafers, X-ray microscopy, Copper, X-ray imaging, Silicon, 3D image processing

Showing 5 of 12 publications
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