Mr. Andrey V. Marchevsky Profile

Andrey V. Marchevsky

PhD student at Technical Univ. of Denmark

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 March 2019 Paper

Andrey Marchevsky, Jesper Mørk, Kresten Yvind

Proceedings Volume 10939, 109390U (2019) https://doi.org/10.1117/12.2509487

KEYWORDS: Diffusion, Silicon, Zinc, Indium gallium arsenide, Ion implantation, Doping, Annealing, Resistance, Ions, Deep ultraviolet

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Keywords/Phrases