Mr. André Fischer Profile

André Fischer

at TU Dresden

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Author

Publications (3)

Proceedings Article | 22 March 2013 Paper

Forensic analysis of interdependencies between vignetting and radial lens distortion

André Fischer, Thomas Gloe

Proceedings Volume 8665, 86650D (2013) https://doi.org/10.1117/12.2004348

KEYWORDS: Distortion, Vignetting, Cameras, Optical aberrations, Sensors, Geometrical optics, Instrument modeling, Forensic science, Databases, Image segmentation

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Proceedings Article | 24 March 2009 Paper

Efficient use of design-based binning methodology in a DRAM fab

Laurent Karsenti, Arno Wehner, Andreas Fischer, Uwe Seifert, Jens Goeckeritz, Mark Geshel, Dieter Gscheidlen, Avishai Bartov

Proceedings Volume 7272, 727239 (2009) https://doi.org/10.1117/12.814095

KEYWORDS: Inspection, Semiconducting wafers, Finite element methods, SRAF, Defect inspection, Optical proximity correction, Design for manufacturing, Metrology, Lithography, Modulation

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Proceedings Article | 4 March 2008 Paper

Design based binning for litho qualification and process window qualification

Andreas Fischer, Uwe Seifert, Arno Wehner, Laurent Karsenti, Mark Geshel, Amiad Conley, Dieter Gscheidlen, Avishai Bartov

Proceedings Volume 6925, 69251S (2008) https://doi.org/10.1117/12.775713

KEYWORDS: Semiconducting wafers, Computer aided design, Scanning electron microscopy, Metrology, Defect inspection, Optical transfer functions, Photomasks, Optical proximity correction, Finite element methods, Lithography

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