Angus Sheng-Ji Chin
Mask Department Manager at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 18 December 2015 Paper
Chen-Yang Lin, Chung-Hsuan Liu, Kuan-Wen Lin, Chi-Lun Lu, Luke Hsu, Angus Chin, Anthony Yen
Proceedings Volume 9635, 963519 (2015) https://doi.org/10.1117/12.2197675
KEYWORDS: Chromium, Ruthenium, Particles, Digital watermarking, Plasma, Photomasks, Oxygen, Extreme ultraviolet, Inspection, Quartz

SPIE Journal Paper | 16 June 2014
Nai-Ching Chen, Chia-Hao Yu, Ching-Fang Yu, Chi-Lun Lu, James Chu, Luke Hsu, Angus Chin, Anthony Yen
JM3, Vol. 13, Issue 02, 023010, (June 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.2.023010
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Particles, Semiconducting wafers, Extreme ultraviolet lithography, Deep ultraviolet, Lithography, Critical dimension metrology, Defect detection

Proceedings Article | 28 June 2013 Paper
C. W. Shen, K. W. Lin, C. L. Lu, Luke Hsu, Angus Chin, Anthony Yen
Proceedings Volume 8701, 870106 (2013) https://doi.org/10.1117/12.2028484
KEYWORDS: Particles, SRAF, Mask cleaning, Photomasks, Inspection, Binary data, Acoustics, Opacity, Cavitation, Diffractive optical elements

Proceedings Article | 8 November 2012 Paper
Kuan-Wen Lin, Chi-Lun Lu, Chin-Wei Shen, Luke Hsu, Angus Chin, Anthony Yen
Proceedings Volume 8522, 852213 (2012) https://doi.org/10.1117/12.975822
KEYWORDS: Particles, Mask cleaning, Photomasks, Quartz, Chemical analysis, Critical dimension metrology, Semiconductor manufacturing, Silicon, Inspection, Manufacturing

Proceedings Article | 8 November 2012 Paper
Mei-Chun Lin, Ching-Fang Yu, Mei-Tsu Lai, Luke Hsu, Angus Chin, Anthony Yen
Proceedings Volume 8522, 85220C (2012) https://doi.org/10.1117/12.977944
KEYWORDS: Inspection, Critical dimension metrology, Scanning electron microscopy, Photomasks, Visualization, Opacity, Metrology, Data acquisition, Image analysis, Databases

Showing 5 of 12 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top