We have reported a novel optical sensor based on whispering gallery mode (WGM) resonance for measuring thermal deformation in microelectromechanical systems (MEMS) devices. New asymptotic expressions for transverse electric and transverse magnetic waves are developed based on electromagnetic theory derivations for the large size parameter ( times diameter divided by wavelength of light) limits. The optical thermal deformation sensor is characterized both theoretically and experimentally by considering the fact that the size parameter of the microspheres is very large at optical wavelengths. As a prototype thermal deformation sensor, an optical fiber experimental setup with tunable laser diode has been used for realizing the effect of WGM resonances due to change in surrounding temperature of a dielectric microsphere made of BK-7 glass. The quality factor of experimental resonance spectra observed in the laboratory is calculated approximately on the order of 104, which is sensitive enough for detecting micro or nano level deformation changes in the surrounding medium. The novel optical sensor can measure the thermal deformation in the MEMS devices as small as the submicron or nanometer level. This sensor could potentially be used for nanotechnology, MEMS devices, biomedical applications, and other microdevices.
We describe, first to our knowledge, optical resonances of Transverse Electric (TE) and Transverse Magnetic (TM) wave
propagations in dielectric micro-circular-cylinder. New Asymptotic approaches have been developed based on TE and TM
waves. Size parameter (pi times diameter divided by wavelength of the light) is phenomenal to demonstrate Whispering
Gallery Mode (WGM) in dielectric circular cylinder. The developed expressions for size parameter for both TE and TM
waves are very simple and can be used to characterize the resonances in dielectric micro-circular-cylinder. Asymptotic
expressions have been developed based on Electro-Magnetic (EM) wave theory derivations which are mathematically
robust than existing approaches presented in the literatures, and can be used to develop optical sensors by characterizing
resonances in dielectric micro-circular-cylinders. The solutions are shown to be very accurate for large size parameters.
A novel micro-machined valveless diffuser-nozzle micropump is presented in the present paper. The micropump is designed by thermally bubble driven actuation method. This pumping mechanism requires no mechanical moving parts for actuation and control of inlet and outlet. As a result, it requires substantially simplified fabrication process in two wafers, which is compatible with IC fabrication processes. The proposed micropump will provide high actuation stroke than existing micropumps.
A novel micro-machined valve-less micro-injector has been demonstrated in the present paper. The micro-injector is designed by thermally bubble driven actuation method that requires no mechanical moving parts for actuation and control of droplets. The use of thermal bubble for actuation provides virtual chamber neck and virtual valves as well. Furthermore it offers simplified fabrication in a single wafer that is compatible with IC fabrication processes.
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