Dr. Anja Voigt
Product Manager Negative Photoresists at micro resist technology GmbH
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Author
Publications (8)

Proceedings Article | 21 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Electron beams, Dry etching, Polymers, Scanning electron microscopy, Reactive ion etching, Plasma

Proceedings Article | 27 March 2014 Paper
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Optical lithography, Silica, Glasses, Copper, Nickel, Silicon, Epoxies, Head-mounted displays, Photoresist processing, Electroplating

Proceedings Article | 27 March 2014 Paper
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Etching, Dry etching, Polymers, Nickel, Silicon, Gases, Oxygen, Plasma etching, Nanoimprint lithography, Plasma

Proceedings Article | 1 September 2011 Paper
Proc. SPIE. 8107, Nano-Opto-Mechanical Systems (NOMS)
KEYWORDS: Microelectromechanical systems, Actuators, Polymers, Silicon, Doping, Epoxies, Semiconducting wafers, Signal detection, Polymeric actuators, Absorption

Proceedings Article | 2 May 2008 Paper
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Gold, Carbon, Ultraviolet radiation, X-rays, Photoresist materials, Photomasks, Vitreous, Beryllium, Electroplating, X-ray lithography

Showing 5 of 8 publications
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