Ankur Agrawal
Graduate Research Assistant
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 12 June 2003 Paper
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.483740
KEYWORDS: Etching, Electron beam lithography, Electron beams, Polymers, Nanocomposites, Lithography, Resistance, Silicon, Plasma etching, Plasma

Proceedings Article | 12 June 2003 Paper
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485137
KEYWORDS: Lithography, Sulfur, Electron beam lithography, Electron beams, Temperature metrology, Surface roughness, Interfaces, X-rays, Polymers, Photoemission spectroscopy

Proceedings Article | 2 June 2003 Paper
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485006
KEYWORDS: Thin films, Data analysis, Silicon films, Photoresist materials, Interferometry, Reflectivity, Silicon, Photoresist developing, Interfaces, Oxides

Proceedings Article | 24 July 2002 Paper
Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474244
KEYWORDS: Electron beams, Microchannel plates, Diffractive optical elements, Polymers, Lithography, Solids, Electron beam lithography, Etching, Standards development, Mask making

Proceedings Article | 24 July 2002 Paper
Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474191
KEYWORDS: FT-IR spectroscopy, Polymethylmethacrylate, Electron beams, Polymers, Absorbance, Ions, Crystals, Silicon films, Electron beam lithography, Quartz

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