Dr. Ann Witvrouw
Manager, MEMS Integration Research Program at imec
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 23 September 2010 Paper
Proc. SPIE. 7750, Photonics North 2010
KEYWORDS: Microelectromechanical systems, Mirrors, Modulation, Electrodes, Image processing, Laser Doppler velocimetry, Micromirrors, Digital micromirror devices, Analog electronics, Chemical mechanical planarization

Proceedings Article | 3 October 2008 Paper
Proc. SPIE. 7155, Ninth International Symposium on Laser Metrology
KEYWORDS: Microelectromechanical systems, Microscopes, Mirrors, Doppler effect, Cameras, Reliability, Optical testing, Data processing, Laser Doppler velocimetry, Micromirrors

Proceedings Article | 3 October 2008 Paper
Proc. SPIE. 7155, Ninth International Symposium on Laser Metrology
KEYWORDS: Microelectromechanical systems, Microscopes, Mirrors, Lithium, Image segmentation, Image processing, Inspection, Micromirrors, Measurement devices, Semiconducting wafers

Proceedings Article | 1 July 2005 Paper
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Signal to noise ratio, Digital signal processing, Resonators, Sensors, Electrodes, Amplifiers, Modulators, Semiconducting wafers, Signal detection

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Packaging, Microbolometers, Thin films, Resonators, Sensors, Spectroscopy, Reliability, Semiconducting wafers, Liquids

Showing 5 of 9 publications
Conference Committee Involvement (4)
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
25 January 2006 | San Jose, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
25 January 2005 | San Jose, California, United States
Reliability, Testing, and Characterization of MEMS/MOEMS III
26 January 2004 | San Jose, California, United States
Reliability, Testing, and Characterization of MEMS/MOEMS II
27 January 2003 | San Jose, CA, United States
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