Dr. Anna Szerling
Assistant Professor at Institute of Electron Technology
SPIE Involvement:
Publications (12)

Proceedings Article | 13 March 2019 Presentation
Proc. SPIE. 10918, Gallium Nitride Materials and Devices XIV
KEYWORDS: Oxides, Switching, Etching, Argon, Silicon, Transmission electron microscopy, Ion implantation, Transistors, Field effect transistors, Plasma treatment

Proceedings Article | 8 March 2019 Presentation
Proc. SPIE. 10926, Quantum Sensing and Nano Electronics and Photonics XVI
KEYWORDS: Semiconductors, Gold, Waveguides, Cladding, Laser induced damage, Copper, Diffusion, Quantum cascade lasers, Semiconductor lasers, Terahertz radiation

SPIE Journal Paper | 25 April 2017
JNP Vol. 11 Issue 02
KEYWORDS: Quantum cascade lasers, Gallium arsenide, Etching, Gallium, Reactive ion etching, Aluminum, Argon, Fiber Bragg gratings, Photoresist materials, Waveguides

Proceedings Article | 20 February 2017 Presentation + Paper
Proc. SPIE. 10123, Novel In-Plane Semiconductor Lasers XVI
KEYWORDS: Gold, Mid-IR, Optical lithography, Deep ultraviolet, Waveguides, Fiber Bragg gratings, Cladding, Etching, Argon, Gallium arsenide, Silicon, Quantum cascade lasers, Photoresist materials, Plasma etching, Reactive ion etching, Waveguide lasers

SPIE Journal Paper | 24 March 2015
JNP Vol. 9 Issue 01
KEYWORDS: Metals, Cladding, Gold, Terahertz radiation, Quantum cascade lasers, Waveguides, Gallium arsenide, Semiconducting wafers, Copper, Laser processing

Showing 5 of 12 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top