Dr. Anwei Jia Profile

Dr. Anwei Jia

at Lasertec USA Inc

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Publications (2)

Proceedings Article | 2 April 2014 Paper

Comparative defect classifications and analysis of Lasertec's M1350 and M7360

Milton Godwin, Dave Balachandran, Tomoya Tamura, Anwei Jia

Proceedings Volume 9050, 90502Z (2014) https://doi.org/10.1117/12.2047659

KEYWORDS: Particles, Inspection, Reflectivity, Scanning electron microscopy, Defect detection, Extreme ultraviolet, Failure analysis, Statistical analysis, Crystals, Signal detection

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Proceedings Article | 13 March 2007 Paper

Inspection with the Lasertec M7360 at the SEMATECH Mask Blank Development Center

Wonil Cho, Patrick Kearney, Eric Gullikson, Anwei Jia, Tomoya Tamura, Atsushi Tajima, Hal Kusunose, Chan-Uk Jeon

Proceedings Volume 6517, 65170D (2007) https://doi.org/10.1117/12.712990

KEYWORDS: Inspection, Photomasks, Extreme ultraviolet lithography, Defect detection, Extreme ultraviolet, Reflectivity, Multilayers, Defect inspection, Atomic force microscopy, Optical spheres

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