Mr. Arief B. Suriadi Profile

Arief B. Suriadi

R&D Engineer

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Publications (2)

Proceedings Article | 30 July 2002 Paper

Uniform metal patterning on micromachined 3D surfaces using multistep exposure of UV light

Arief Suriadi, Frank Berauer, Akari Yasunaga, Alfred Pan, Hubert Vander Plas

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474645

KEYWORDS: Metals, Semiconducting wafers, Optical lithography, Photoresist materials, Silicon, Photomasks, Microelectromechanical systems, Ultraviolet radiation, Reticles, Etching

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Proceedings Article | 26 April 2001 Paper

Photolithography on micromachined 3D surfaces using spray coating technology of photoresist

Arief Suriadi, Thomas Luxbacher

Proceedings Volume 4404, (2001) https://doi.org/10.1117/12.425213

KEYWORDS: Photoresist materials, Semiconducting wafers, Coating, Etching, Metals, Thin film coatings, Optical lithography, Silicon, Anisotropic etching, Photoresist developing

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