Mr. Arjun Hegde Profile

Arjun Hegde

at KLA Corp

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Publications (1)

Proceedings Article | 13 October 2021 Presentation + Paper

Deep learning-based defect detection using large FOV SEM for 28 nm pitch BEOL layer patterned with 0.33NA single exposure EUV

Sayantan Das, Kaushik Sah, Ardis Liang, Hemanta Roy, Kha Tran, Binesh Babu, Arjun Hegde, Andrew Cross, Philippe Leray, Sandip Halder

Proceedings Volume 11854, 118540Y (2021) https://doi.org/10.1117/12.2600954

KEYWORDS: Inspection, Defect detection, Semiconducting wafers, Scanning electron microscopy, Extreme ultraviolet lithography, Critical dimension metrology, Etching

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