Dr. Arman Gasparyan Profile

Dr. Arman Gasparyan

at Nokia Bell Labs

SPIE Involvement:

Author | Instructor

Proceedings Article | 8 February 2008 Paper

Closed-loop AO demonstration of MEMS SLM with piston, tip and tilt control

Maria Elina Simon, Rick Papazian, Arman Gasparyan, Vladimir Aksyuk, Harold Dyson, Roland Ryf, Robert Frahm, Susanne Arney, David Ramsey, Flavio Pardo

Proceedings Volume 6888, 68880T (2008) https://doi.org/10.1117/12.770432

KEYWORDS: Spatial light modulators, Adaptive optics, Point spread functions, Microelectromechanical systems, Cameras, Control systems, Electronics, Wavefront sensors, Prototyping, Actuators

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Proceedings Article | 16 August 2004 Paper

Design for reliability of drift-free MEMS micromirrors

Arman Gasparyan, Herbert Shea

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.549111

KEYWORDS: Dielectrics, Electrodes, Microelectromechanical systems, Micromirrors, Reliability, Corrosion, Mirrors, Etching, Packaging, Semiconducting wafers

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Proceedings Article | 24 April 2003 Paper

Optical MEMS devices for telecom systems

Robert Frahm, L. Gomez, S. Rogers, John Miner, Jungsang Kim, Paul Kolodner, Dennis Greywall, Fred Klemens, J. Weld, Hong Tang, Vladimir Aksyuk, Dan Marom, K. Teffeau, Cristian Bolle, Avi Kornblit, Nagesh Basavanhally, A. Ramirez, C. Pai, Dustin Carr, William Mansfield, H. Chan, Victor Lifton, Ronald Scotti, J. Bower, Yee Low, R. Keller, E. Ferry, Arman Gasparyan, David Ramsey, Joseph Vuillemin, Martin Haueis, H. Soh, Herbert Shea, Susanne Arney, John Gates, M. Simon, J. Taylor, T. Kroupenkine, Flavio Pardo, Jian Liu, Roland Ryf, C. Randy Giles, Warren Lai, Mark Paczkowski, David Neilson, Suresh Goyal, H. Bair, David Bishop, Raymond Cirelli, Gregory Bogart

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499075

KEYWORDS: Mirrors, Electrodes, Silicon, Microelectromechanical systems, Switches, Reflectors, Semiconducting wafers, Microopto electromechanical systems, Oxides, Optical fabrication equipment

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Proceedings Article | 2 October 2001 Paper

Design for reliability of MEMS/MOEMS for lightwave telecommunications

Flavio Pardo, C. Randy Giles, Arman Gasparyan, Susanne Arney, David Bishop, Herbert Shea, Vladimir Aksyuk, Cristian Bolle, Robert Frahm, Suresh Goyal, Michael Lin, Carolyn White

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442996

KEYWORDS: Microopto electromechanical systems, Reliability, Microelectromechanical systems, Packaging, Telecommunications, Networks, Silicon, Physics, Mechanical engineering, Feedback loops

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Proceedings Article | 10 August 2000 Paper

Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors

Paul Busch, Susanne Arney, Arman Gasparyan, Vladimir Aksyuk

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395696

KEYWORDS: Micromirrors, Mirrors, Reliability, Microelectromechanical systems, Doppler effect, Electrodes, Motion measurement, Signal detection, Switching, Interferometry

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Proceedings Article | 10 August 2000 Paper

Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages

Arman Gasparyan, Susanne Arney, Herbert Shea, Carolyn White, Robert Comizzoli, David Abusch-Magder

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395700

KEYWORDS: Electrodes, Humidity, Silicon, Microelectromechanical systems, Reliability, Oxides, Etching, Scanning electron microscopy, HF etching, Oxidation

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Showing 5 of 6 publications

Course Instructor

SC434: Designing MEMS for Reliability

This course will provide attendees with a basic working knowledge of how to design MEMS for reliability. The course will concentrate on MEMS design, reliability physics, MEMS-specific fundamental reliability phenomena and failure modes, and accelerated testing protocols. Practical and useful examples from various arenas of MEMS application will be provided.

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