Dr. Arndt Last Profile

Dr. Arndt Last

at Karlsruher Institut für Technologie

SPIE Involvement:

Author

Publications (22)

SPIE Journal Paper | 14 February 2024 Open Access

Stabilizing high aspect ratio x-ray gratings with top layer resist grid

Michael Richter, Thomas Beckenbach, Constantin Rauch, Stephan Schreiner, Marcus Zuber, Elias Hamann, Arndt Last, Martin Börner, Jan Korvink, Pascal Meyer

JM3, Vol. 23, Issue 01, 014901, (February 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.014901

KEYWORDS: Bridges, X-rays, Gold, Scanning electron microscopy, Metals, Electroplating, Nickel, Photoresist processing, Fabrication, Optical gratings

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SPIE Journal Paper | 25 May 2022 Open Access

Investigation on the mechanical interface stability of curved high aspect ratio x-ray gratings made by deep x-ray lithography

Michael Richter, Thomas Beckenbach, Heiner Daerr, Sven Prevrhal, Martin Börner, Josephine Gutekunst, Pouria Zangi, Arndt Last, Jan Korvink, Pascal Meyer

JM3, Vol. 21, Issue 02, 024901, (May 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.024901

KEYWORDS: X-rays, Interfaces, Semiconducting wafers, X-ray lithography, X-ray imaging, X-ray detectors, Metals, Manufacturing, X-ray sources, Silicon

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Proceedings Article | 27 September 2013 Paper

High-speed photon energy tuning of x-rays with high duty cycle by use of Clessidra prism arrays

Werner Jark, Arndt Last, Ottó Márkus

Proceedings Volume 8848, 884806 (2013) https://doi.org/10.1117/12.2023921

KEYWORDS: Prisms, Monochromators, X-rays, Dispersion, Spectral resolution, Refraction, Refractive index, Interfaces, X-ray optics, High speed photonics

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Proceedings Article | 3 May 2013 Paper

Concepts for rapid tuning and switching of x-ray energies

Werner Jark, Arndt Last

Proceedings Volume 8777, 877712 (2013) https://doi.org/10.1117/12.2017446

KEYWORDS: Prisms, Monochromators, X-rays, Spectral resolution, Refraction, Switching, Dispersion, Refractive index, Chromatic aberrations, X-ray optics

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Proceedings Article | 21 September 2011 Paper

X-ray refractive large aperture rolled prism lenses as condensers for x-ray tubes

H. Vogt, M. Simon, A. Last, F. Marschall, J. Mohr, V. Nazmov, R. Eisenhower, K. Mettendorf

Proceedings Volume 8167, 81670V (2011) https://doi.org/10.1117/12.897004

KEYWORDS: Lenses, X-rays, Prisms, X-ray optics, Sensors, X-ray diffraction, X-ray microscopy, Collimators, Glasses, Neodymium

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Proceedings Article | 4 May 2011 Paper

Advances in the development of x-ray refractive large aperture rolled prism lenses

H. Vogt, R. Eisenhower, A. Last, K. Mettendorf, J. Mohr, V. Nazmov, M. Simon

Proceedings Volume 8076, 80760I (2011) https://doi.org/10.1117/12.890037

KEYWORDS: Lenses, X-rays, Prisms, Semiconducting wafers, Absorption, Silicon, X-ray technology, X-ray optics, Optical components, Geometrical optics

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Proceedings Article | 20 September 2010 Paper

Micro-and nano-tomography at the GKSS Imaging Beamline at PETRA III

A. Haibel, M. Ogurreck, F. Beckmann, T. Dose, F. Wilde, J. Herzen, M. Müller, A. Schreyer, V. Nazmov, M. Simon, A. Last, J. Mohr

Proceedings Volume 7804, 78040B (2010) https://doi.org/10.1117/12.860852

KEYWORDS: Tomography, X-ray optics, X-rays, Sensors, Spatial resolution, Monochromators, Lenses, Optical components, Photons, Crystals

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Proceedings Article | 13 May 2010 Paper

Refractive x-ray optics made from polymer microstructures

M. Simon, V. Nazmov, E. Reznikova, A. Last, J. Mohr, P.-J. Jakobs, V. Saile, O. Bunk, C. Kewish, D. Batchelor, R. Simon

Proceedings Volume 7716, 77161B (2010) https://doi.org/10.1117/12.858894

KEYWORDS: Lenses, X-rays, Prisms, X-ray optics, X-ray lithography, Polymers, Synchrotron technology, X-ray microscopy, Photorefractive polymers, X-ray imaging

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Proceedings Article | 27 September 2008 Paper

Achromatic x-ray focusing using diffractive and refractive elements

Marion Umbach, Vladimir Nazmov, Markus Simon, Arndt Last, Volker Saile

Proceedings Volume 7100, 71001U (2008) https://doi.org/10.1117/12.797782

KEYWORDS: Zone plates, X-rays, Chemical elements, Fresnel lenses, Optical components, Chromatic aberrations, X-ray diffraction, Refraction, Diffraction, Nickel

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Proceedings Article | 27 September 2008 Paper

Testing of x-ray prism lenses

M. Simon, E. Reznikova, V. Nazmov, M. Umbach, A. Last

Proceedings Volume 7100, 710025 (2008) https://doi.org/10.1117/12.797885

KEYWORDS: X-rays, Lenses, Prisms, X-ray lithography, Absorption, Synchrotron radiation, CCD cameras, Polymethylmethacrylate, Chemical elements, X-ray detectors

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Proceedings Article | 3 September 2008 Paper

X-ray prism lenses with large apertures

M. Simon, E. Reznikova, V. Nazmov, A. Last, W. Jark

Proceedings Volume 7077, 70771Q (2008) https://doi.org/10.1117/12.795423

KEYWORDS: X-rays, Lenses, Prisms, Photomasks, Transparency, X-ray lithography, X-ray sources, Absorption, X-ray optics, Polymethylmethacrylate

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Proceedings Article | 3 September 2008 Paper

Numerical simulations of achromatic x-ray lenses

Marion Umbach, Vladimir Nazmov, Markus Simon, Arndt Last, Volker Saile

Proceedings Volume 7077, 70770G (2008) https://doi.org/10.1117/12.795222

KEYWORDS: Lenses, X-rays, Absorption, Numerical simulations, Refraction, Nickel, Silicon, Fresnel lenses, Refractive index, X-ray optics

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Proceedings Article | 15 May 2008 Paper

Fabrication method to create high-aspect ratio pillars for photonic coupling of board level interconnects

C. Debaes, J. Van Erps, M. Karppinen, J. Hiltunen, H. Suyal, A. Last, M. Lee, P. Karioja, M. Taghizadeh, J. Mohr, H. Thienpont, A. Glebov

Proceedings Volume 6992, 69920T (2008) https://doi.org/10.1117/12.782721

KEYWORDS: Multiphoton lithography, Polymers, Waveguides, Photomasks, Lithography, Optical interconnects, Optoelectronics, Ultraviolet radiation, Scanning electron microscopy, Sensors

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Proceedings Article | 9 May 2006 Paper

Reliability studies of micro-optical components in NEMO

F. Berghmans, M. Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik, C. Gorecki, L. Hirsinger, P. Delobelle, P. Kniazewski, L. Salbut, M. Kujawinska

Proceedings Volume 6193, 61930A (2006) https://doi.org/10.1117/12.662001

KEYWORDS: Refractive index, Reliability, Aluminum nitride, Metals, Optical fibers, Microelectromechanical systems, Tomography, Micro optics, Gold, Glasses

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Proceedings Article | 28 April 2006 Paper

A new wireless and miniaturized high-resolution optical displacement sensor

Y. Jourlin, O. Parriaux, S. Reynaud, J. C. Pommier, M. Johnson, A. Last, M. Guttmann

Proceedings Volume 6188, 61881B (2006) https://doi.org/10.1117/12.661913

KEYWORDS: Head, Sensors, Diffraction gratings, Optical design, Mirrors, Free space optics, Diffraction, Computer programming, Signal detection, Optical resolution

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Proceedings Article | 25 April 2006 Paper

Low loss polarizing beam splitter using the long range plasmon mode along a continuous metal film

Y. Jourlin, E. Gamet, S. Tonchev, A. Tishchenko, O. Parriaux, A. Last

Proceedings Volume 6187, 61870H (2006) https://doi.org/10.1117/12.668364

KEYWORDS: Metals, Polarization, Plasmons, Gold, Beam splitters, Thin films, Polymers, Polymer thin films, Reflection, Photoresist materials

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Proceedings Article | 21 April 2006 Paper

High-efficiency diffraction grating coupler for multimode optical interconnect

Janyce Franc, Nathalie Destouches, Danièle Blanc, Jean-Claude Pommier, Svetlen Tonchev, Geert Van Steenberge, Nina Hendrickx, Arndt Last, Olivier Parriaux

Proceedings Volume 6185, 61851F (2006) https://doi.org/10.1117/12.666710

KEYWORDS: Diffraction gratings, Waveguides, Diffraction, Metals, Optical interconnects, Interfaces, Reflection, Mirrors, Dielectrics, Gold

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Proceedings Article | 15 October 2005 Paper

Improved grating microspectrometer

C. Moran-Iglesias, A. Last, J. Mohr

Proceedings Volume 5962, 596225 (2005) https://doi.org/10.1117/12.625169

KEYWORDS: Spectroscopy, Mirrors, Sensors, Waveguides, Collimators, Hollow waveguides, Spectral resolution, Photography, Reflection, Diffraction gratings

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Proceedings Article | 13 June 2005 Paper

Confocal micro-optical distance sensor: realization and results

Peter Lucke, Arndt Last, Jurgen Mohr, Aiko Ruprecht, Christof Pruss, Hans Tiziani, Wolfgang Osten, Peter Lehmann, Sven Schonfelder

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612418

KEYWORDS: Sensors, Confocal microscopy, Head, Light sources, Signal detection, Diffractive optical elements, Colorimetry, Optical components, Polymethylmethacrylate, Optical alignment

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Proceedings Article | 13 June 2005 Paper

Confocal micro-optical distance sensor: principle and design

Aiko Ruprecht, Christof Pruss, Hans Tiziani, Wolfgang Osten, Peter Lucke, Arndt Last, Jurgen Mohr, Peter Lehmann

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612008

KEYWORDS: Sensors, Confocal microscopy, Colorimetry, Head, Ray tracing, Optical components, Optical design, Fiber optics sensors, Diffraction, Mirrors

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Proceedings Article | 8 September 2004 Paper

Polymer technologies: a way to low-cost optical components and systems

Jurgen Mohr, Uwe Hollenbach, Arndt Last, Ulrike Wallrabe

Proceedings Volume 5453, (2004) https://doi.org/10.1117/12.554937

KEYWORDS: Polymers, Optical components, Ultraviolet radiation, Spectroscopy, Glasses, Connectors, X-ray lithography, Structured optical fibers, Sensors, Optics manufacturing

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Proceedings Article | 1 September 2004 Paper

Confocal micro-optical distance sensor for precision metrology

Peter Luecke, Arndt Last, Juergen Mohr, Aiko Ruprecht, Wolfgang Osten, Hans Tiziani, Peter Lehmann

Proceedings Volume 5459, (2004) https://doi.org/10.1117/12.545404

KEYWORDS: Sensors, Head, Confocal microscopy, Diffractive optical elements, Metrology, Tolerancing, Optical components, Optical alignment, Quartz, Zemax

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Showing 5 of 22 publications

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