Dr. Ash M. Parameswaran
Assoc Prof & Director of IMMR at Simon Fraser Univ
SPIE Involvement:
Author | Instructor
Publications (19)

Proceedings Article | 14 February 2012 Paper
Proc. SPIE. 8251, Microfluidics, BioMEMS, and Medical Microsystems X
KEYWORDS: Gold, Microfluidics, Drug development, Electrodes, Glasses, Ions, Diffusion, 3D modeling, Time metrology, Finite element methods

Proceedings Article | 7 February 2012 Paper
Proc. SPIE. 8248, Micromachining and Microfabrication Process Technology XVII
KEYWORDS: Microelectromechanical systems, Microfluidics, Optical lithography, Polymethylmethacrylate, Deep ultraviolet, Etching, Lamps, Aluminum, Microfabrication, Light

Proceedings Article | 17 February 2011 Paper
Proc. SPIE. 7875, Sensors, Cameras, and Systems for Industrial, Scientific, and Consumer Applications XII
KEYWORDS: CMOS sensors, Sensors, Photodiodes, Computer simulations, CMOS technology, Active sensors, TCAD, Device simulation, Standards development, Absorption

Proceedings Article | 15 February 2011 Paper
Proc. SPIE. 7929, Microfluidics, BioMEMS, and Medical Microsystems IX
KEYWORDS: Lithography, Polymethylmethacrylate, Cancer, Tissues, Nanoparticles, Electrodes, Polymers, Metals, Skin, Silver

Proceedings Article | 18 February 2010 Paper
Proc. SPIE. 7593, Microfluidics, BioMEMS, and Medical Microsystems VIII
KEYWORDS: Microfluidics, Optical lithography, Polymethylmethacrylate, Deep ultraviolet, Etching, Image processing, Ultraviolet radiation, Lamps, Printing, Computer aided design

Showing 5 of 19 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 20 October 2000

SPIE Conference Volume | 29 September 1999

Conference Committee Involvement (8)
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
13 December 2004 | Sydney, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics
10 December 2003 | Perth, Australia
Smart Sensors, Actuators, and MEMS
19 May 2003 | Maspalomas, Gran Canaria, Canary Islands, Spain
Micromachining and Microfabrication Process Technology VIII
27 January 2003 | San Jose, CA, United States
Showing 5 of 8 Conference Committees
Course Instructor
SC236: Polysilicon Surface Micromachine Technology and Devices
This course is designed to introduce newcomers to micromachining technology and concepts as well as those with a basic familiarity with integrated circuit manufacturing technology about the emerging field of Micro Electro Mechanical Systems (MEMS). Both manufacturing technologies for these devices and examples of sensor and actuator devices will be presented. The course focuses on polysilicon surface micromachining, but will also include a brief overview of other MEMS manufacturing technologies and devices.
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