Ashwanth Subramanian
at Stony Brook University
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Oxides, Optical lithography, Etching, Metals, Silicon, Resistance, Extreme ultraviolet, Plasma etching, Nanolithography, Scanning transmission electron microscopy

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Etching, Atomic layer deposition, Extreme ultraviolet lithography

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