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Atsushi Ueda
at Gigaphoton Inc
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Publications (1)
Proceedings Article | 26 March 2019 Paper
Update of the development progress of the high power LPP-EUV light source using a magnetic field
Atsushi Ueda, Shinji Nagai, Tsukasa Hori, Yutaka Shiraishi, Tatsuya Yanagida, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Takeshi Okamoto, Tamotsu Abe, Takeshi Kodama, Hiroaki Nakarai, Takashi Saito, Hakaru Mizoguchi
Proceedings Volume 10957, 109571S (2019) https://doi.org/10.1117/12.2514809
KEYWORDS: Tin, Gas lasers, Extreme ultraviolet, Magnetism, Carbon monoxide, Mirrors, Plasma, Light sources, Pulsed laser operation, Semiconductors
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