Dr. Austin L. Huang Profile

Dr. Austin L. Huang

Marketing and Business Development Manager at Compound Photonics

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Proceedings Article | 29 July 1992 Paper

Effect of fabrication techniques on photodiode performance under 1.06-um pulsed-laser irradiation

Austin Huang, Rodger Walser, Michael Becker

Proceedings Volume 1624, (1992) https://doi.org/10.1117/12.60097

KEYWORDS: Photodiodes, Fabrication, Laser irradiation, Ion implantation, Crystals, Diodes, PIN photodiodes, Nd:YAG lasers, Optical microscopes, Doping

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This research investigates the damage morphology and electrical performance of variously fabricated PIN photodiodes under single-pulse laser irradiation. Specially-ordered and industrial-standard photodiodes were irradiated with various fluences from a 10 ns Nd:YAG laser at 1064 nm. Morphological damage was defined as any residual surface damage observed at 200X magnification under a Normarski optical microscope. Electrical damage entailed any significant change in reverse bias current between the before and after laser-irradiated I-V curves. The electrical transient photocurrent was monitored and recorded for anomalous electrical response. It is presumed that the different fabrication processes will affect the electrical response of the photodiode. The photodiode sample sets differed from one another by the doping mechanism (ion implantation or planar diffusion), the crystallinity of the substrate prior to ion implantation (crystalline or amorphous), and the anneal or regrowth processing (furnace or rapid thermal anneal). All diodes were p⁺-n photodiodes produced by implanting boron into a high-resistivity, n-doped silicon substrate. The junction depth of all the diodes was between 0.5 and 1.2 micrometers .

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