Dr. Axel Berthold Profile

Dr. Axel Berthold

at Fraunhofer-IZFP

SPIE Involvement:

Author

Proceedings Article | 10 April 2007 Paper

X-ray detectors for NDE applications

Michael Kroening, Revaz Melkadze, Tatiana Lezhneva, Levan Khvedelidze, Givi Kalandadze, Tilo Baumbach, Axel Berthold

Proceedings Volume 6530, 653007 (2007) https://doi.org/10.1117/12.717217

KEYWORDS: Gallium arsenide, Sensors, Americium, Silicon, Photons, X-rays, PIN photodiodes, Absorption, X-ray detectors, Semiconducting wafers

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Proceedings Article | 30 March 2006 Paper

New trends in NDE and health monitoring

Norbert Meyendorf, Axel Berthold

Proceedings Volume 6179, 617901 (2006) https://doi.org/10.1117/12.660772

KEYWORDS: Nondestructive evaluation, Sensors, Inspection, Ultrasonics, Transducers, Electronics, Phased arrays, Signal processing, Sensor networks, Acoustics

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Proceedings Article | 9 May 2005 Paper

Materials investigation of gallium arsenide for direct converting energy sensitive x-ray detectors

Michael Kroening, Igor Besse, Tilo Baumbach, Axel Berthold, R. Melkadze, T. Lezhneva, L. Khvedelidze, G. Kalandadze

Proceedings Volume 5770, (2005) https://doi.org/10.1117/12.601907

KEYWORDS: Gallium arsenide, Sensors, Americium, Silicon, Photons, X-rays, PIN photodiodes, Absorption, X-ray detectors, Semiconducting wafers

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Proceedings Article | 9 May 2005 Paper

Sensor modules for structural health monitoring and reliability of components

Michael Kroening, Axel Berthold, Norbert Meyendorf

Proceedings Volume 5770, (2005) https://doi.org/10.1117/12.602316

KEYWORDS: Structural health monitoring, Sensors, Signal processing, Nondestructive evaluation, Inspection, Reliability, Safety, Data communications, Digital signal processing, Wind energy

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Proceedings Article | 18 August 2000 Paper

Backwafer optical lithography and wafer distortion in substrate transfer technologies

Henk Van Zeijl, J. Slabbekoorn, L. Nanver, Paul Van Dijk, Axel Berthold, T. Machielsen

Proceedings Volume 4181, (2000) https://doi.org/10.1117/12.395730

KEYWORDS: Semiconducting wafers, Overlay metrology, Optical alignment, Mirrors, Optical lithography, Silicon, Lithography

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Proceedings Article | 20 July 1998 Paper

Low-temperature quartz-to-silicon bonding for SAW applications

Axel Berthold, Pasqualina Sarro, Michael Vellekoop

Proceedings Volume 3328, (1998) https://doi.org/10.1117/12.320200

KEYWORDS: Silicon, Semiconducting wafers, Quartz, Silicon films, Thin films, Sensors, Acoustics, Etching, Thin film devices, Metals

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Proceedings Article | 20 July 1998 Paper

Micromachined wet cell for a Love-wave liquid sensor

Scott Curtin, Bernhard Jakoby, Axel Berthold, Vijay Varadan, Vasundara Varadan, Michael Vellekoop

Proceedings Volume 3328, (1998) https://doi.org/10.1117/12.320170

KEYWORDS: Liquids, Sensors, Silicon, Semiconducting wafers, Photomasks, Etching, Acoustics, Wave propagation, Transducers, Aluminum

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Proceedings Article | 5 September 1997 Paper

Influence of processes and selective bonding technology

Jiwei Jiao, Axel Berthold, Michael Vellekoop, Patrick French

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284488

KEYWORDS: Chemical vapor deposition, Low pressure chemical vapor deposition, Surface roughness, Temperature metrology, Plasma enhanced chemical vapor deposition, Oxides, Silicon

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Showing 5 of 8 publications

Conference Committee Involvement (3)

Smart Sensor Phenomena, Technology, Networks, and Systems

10 March 2008 | San Diego, California, United States

Sensor Systems and Networks: Phenomena, Technology and Applications for NDE and Health Monitoring

19 March 2007 | San Diego, California, United States

Advanced Sensor Technologies for NDE and Structural Health Monitoring II

1 March 2006 | San Diego, CA, United States

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