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Dr. Ayad Ghannam
at 3DiS Technologies
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Author
Publications (1)
Proceedings Article | 16 April 2011 Paper
Comparisons of the new thick negative resist to Su8 resist
D. Bourrier, M. Dilhan, A. Ghannam, H. Granier
Proceedings Volume 7972, 79722F (2011) https://doi.org/10.1117/12.870496
KEYWORDS: Photoresist processing, Copper, Photoresist materials, Electroplating, Plasma etching, Metals, Microelectromechanical systems, Etching, Semiconducting wafers, Gold
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