Ayako Nakajima
at Osaka Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Carbon, Lithography, Optical lithography, Chemical species, Scanning electron microscopy, Fluorine, Absorption

Proceedings Article | 28 June 2019 Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Oxides, Nanoparticles, Metals, X-rays, Reflectivity, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Zirconium dioxide

Proceedings Article | 31 May 2019 Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Lithography, Quartz, Polymers, Molecules, Crystals, Diffusion, Complex systems, Extreme ultraviolet lithography, Polymer thin films, Chemically amplified resists

Proceedings Article | 3 October 2018 Presentation + Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Lithography, Electron beam lithography, Polymethylmethacrylate, Polymers, Molecules, Silicon, Scanning electron microscopy, Nanoimprint lithography, Semiconducting wafers, Nanolithography

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