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Azrif Manut
at MIMOS Berhad
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Publications (1)
Proceedings Article | 5 January 2006 Paper
Optimization of flexure geometry in out-of-plane capacitive accelerometer for mechanical sensitivity enhancement
Azrif Manut, Ibrahim Mat, Mohd Ismahadi Syono
Proceedings Volume 6035, 603523 (2006) https://doi.org/10.1117/12.638415
KEYWORDS: Microelectromechanical systems, Sensors, Electrodes, Computer aided design, Capacitance, Capacitors, Optical simulations, Automotive electronic systems, Lanthanum, Information operations
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