Mr. B. Krishnakumar Profile

B. Krishnakumar

at Intel Corporation

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Publications (2)

Proceedings Article | 6 December 2004 Paper

Reduction of radial CD errors and Cr loading effects in 90-nm binary NCAR mask process through chrome etch DOE

Jian Ma, Chaoyang Li, Larry Bassist, Matthew Pekney, Nathan Wilcox, Jeff Farnsworth, Edward Lauder, B. Krishnakumar

Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology

KEYWORDS: Reticles, Diffractive optical elements, Phase modulation, Etching, Manufacturing, Chromium, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

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Proceedings Article | 27 August 1992 Paper

Visual sensitivity to color-varying stimuli

Sarah Rajala, H. Joel Trussell, B. Krishnakumar

Proc. SPIE. 1666, Human Vision, Visual Processing, and Digital Display III

KEYWORDS: Eye, Modulation, Visualization, Spatial frequencies, Calibration, Retina, Colorimetry, Quantization, Visual system, Human vision and color perception

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