Dr. Babak Heidari Profile

Dr. Babak Heidari

CEO at OpTool AB

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Author

Publications (5)

Proceedings Article | 4 April 2011 Paper

Fabrication of hole pattern for position-controlled MOVPE-grown GaN nanorods with highly precise nanoimprint technology

Torbjörn Eriksson, Ki-Dong Lee, Babak Heidari, Patrick Rode, Werner Bergbauer, Martin Mandl, Christopher Kölper, Martin Strassburg

Proceedings Volume 7970, 797015 (2011) https://doi.org/10.1117/12.879368

KEYWORDS: Nanoimprint lithography, Gallium nitride, Nanostructures, Semiconducting wafers, Scanning electron microscopy, Etching, Silica, Nanotechnology, Manufacturing, Nanorods

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Proceedings Article | 3 April 2010 Paper

High volume manufacturing of nanoimprint lithography produced devices: addressing the stamp supply challenge

Ye Zhou, Mohamed Asbahi, Gang Luo, Torbjörn Eriksson, Shoko Yamada, Prasanna Venkatesh Krishnan, Babak Heidari

Proceedings Volume 7637, 76371X (2010) https://doi.org/10.1117/12.848332

KEYWORDS: Nickel, Manufacturing, Nanoimprint lithography, Lithography, High volume manufacturing, Nanostructures, Electroplating, Polymers, Semiconducting wafers, Atomic force microscopy

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Proceedings Article | 30 September 2009 Paper

A non-destructive metrology solution for detailed measurements of imprint templates and media

Jeffrey Roberts, Linlin Hu, Torbjörn Eriksson, Kristian Thulin, Babak Heidari

Proceedings Volume 7488, 74881Z (2009) https://doi.org/10.1117/12.833465

KEYWORDS: Reflectivity, Transmittance, Beam propagation method, Gemini Observatory, Scanning electron microscopy, Magnetism, Nondestructive evaluation, Lithography, Data modeling, Metrology

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Proceedings Article | 20 March 2008 Open Access

Breaking the limits: combination of electron beam lithography and nanoimprint lithography for production of next-generation magnetic media and optical media

Babak Heidari, Marc Beck

Proceedings Volume 6921, 692103 (2008) https://doi.org/10.1117/12.782461

KEYWORDS: Magnetism, Electron beam lithography, Lithography, Nanoimprint lithography, Optical discs, Polymers, Electron beams, Nickel, Ultraviolet radiation, Scanning electron microscopy

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Proceedings Article | 21 July 2000 Paper

Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays

Lars Montelius, Babak Heidari, Mariusz Graczyk, Torbjoern Ling, Ivan Maximov, Eva-Lena Sarwe

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390081

KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Metals, Polymethylmethacrylate, Nanolithography, Lithography, Reactive ion etching, Etching, Sensors, Nanostructures

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Conference Committee Involvement (3)

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI

5 February 2013 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V

24 January 2012 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV

25 January 2011 | San Francisco, California, United States

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