Prof. Baoqin Chen
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 21 August 2014 Paper
Proc. SPIE. 9285, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials for Manufacturing and Testing
KEYWORDS: Signal to noise ratio, Lithography, Microscopes, Electron beam lithography, Electron beams, Metals, Silicon, Signal processing, Optical alignment, Signal detection

SPIE Journal Paper | 1 May 2008
OE Vol. 47 Issue 05
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

Proceedings Article | 21 November 2007 Paper
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Electron beams, Backscatter, Chemical species, Silicon, Hydrogen, Nanoimprint lithography, Nanolithography

Proceedings Article | 21 November 2007 Paper
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Gold, Electron beam lithography, Diffraction, Electron beams, Spectroscopy, X-rays, X-ray diffraction, Silicon, Photomasks, X-ray lithography

Proceedings Article | 14 November 2007 Paper
Proc. SPIE. 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Gold, Electron beam lithography, X-ray optics, Diffractive optical elements, X-rays, X-ray diffraction, Silicon, Photomasks, Electroplating, X-ray lithography

Showing 5 of 9 publications
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