Barbara Spitz
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 February 2020 Paper
Proceedings Volume 11293, 112930D (2020) https://doi.org/10.1117/12.2551271
KEYWORDS: Actuators, Finite element methods, Silicon, Microelectromechanical systems, Solids, Capacitors, Differential equations, Complex systems, Acoustics

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